Charged particle beam column and method for directing a...

Details Charged particle beam column and method for directing a... Charged particle beam column and method for directing a...

2007-05-29

2007-05-29

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000, C250S309000

Reexamination Certificate

active

10154530

ABSTRACT:
A method and charged particle beam column are presented for directing a primary charged particle beam onto a sample. The primary charged particle beam, propagating along an initial axis of beam propagation towards a focusing assembly, passes through a beam shaper, that affects the cross section of the primary charged particle beam to compensate for aberrations of focusing caused by astigmatism effect of a focusing field produced by an objective lens arrangement of the focusing assembly, and then passes through a beam axis alignment system, that aligns the axis of the primary charged particle beam with respect to the optical axis of the objective lens arrangement.

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International Search Report, PCT/US 03/14974.

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