Charged particle beam column and method of its operation

Details Charged particle beam column and method of its operation Charged particle beam column and method of its operation

2006-06-27

2006-06-27

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S306000, C250S309000, C250S310000, C250S311000, C250S398000, C250S440110

Reexamination Certificate

active

07067807

ABSTRACT:
A method and system are presented for controlling inspection of a sample with a charged particle beam. A certain given voltage is supplied to an anode of the column to provide a required accelerating voltage for a charged particle beam. A certain negative voltage is supplied to the sample selected so as to provide a desirably high effective voltage of the column at said given voltage of the anode. A certain voltage is supplied an electrode of a lens arrangement located closer to the sample, this voltage being selected to satisfy one of the following conditions: the electrode voltage is either equal to or slightly lower than that of the sample; and the electrode voltage is significantly higher than that of the sample.

REFERENCES:
patent: 4943722 (1990-07-01), Breton et al.
patent: 5789748 (1998-08-01), Liu et al.
patent: 6069363 (2000-05-01), Golladay
patent: 6344750 (2002-02-01), Lo et al.
patent: 6472662 (2002-10-01), Archie
patent: 6559459 (2003-05-01), Tanaka et al.
patent: 6566897 (2003-05-01), Lo et al.
patent: 6721052 (2004-04-01), Zhao et al.
patent: 6797953 (2004-09-01), Gerlach et al.
patent: 6842251 (2005-01-01), Holden
patent: 6897442 (2005-05-01), Petrov
patent: 2002/0033449 (2002-03-01), Nakasuji et al.
patent: 2002/0117967 (2002-08-01), Gerlach et al.
patent: 2002/0148961 (2002-10-01), Nakasuji et al.
patent: 2003/0132382 (2003-07-01), Sogard
patent: 2004/0173746 (2004-09-01), Petrov et al.
patent: 2004/0211913 (2004-10-01), Petrov
patent: 2005/0045821 (2005-03-01), Noji et al.
patent: 2006/0016988 (2006-01-01), Petrov et al.

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