Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-02-15
2009-12-08
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000
Reexamination Certificate
active
07629578
ABSTRACT:
The invention provides a charged particle beam device for irradiating a specimen, comprising a particle source for providing a beam of charged particles, an optical device for directing the beam of charged particles onto the specimen and an ozone unit for reducing the charging and/or contamination of the specimen. The ozone unit comprises a supply of ozone and a specimen nozzle unit for directing an ozone gas flow to the specimen. Further, the invention provides a charged particle beam device for irradiating a specimen comprising a particle source for providing a beam of charged particles, an optical device for directing the beam of charged particles onto the specimen, a detector and a gas unit for reducing the charging and/or contamination of the detector. The gas unit comprises a supply of gas and a detector nozzle unit for directing a gas flow to the detector. Further, the present invention provides methods for operating charged particle beam devices according to the present invention.
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XP-002391801, Japan, Jun. 9, 1998, Hitachi Ltd.
Elgar Yacov
Frosien Juergen
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterprufte
Patterson & Sheridan L.L.P.
Smith Johnnie L
Wells Nikita
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