Charged particle beam device

Details Charged particle beam device Charged particle beam device

2008-03-11

2010-11-23

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S306000, C250S310000, C250S311000, C382S141000, C382S144000, C382S145000, C382S149000, C382S169000, C348S080000

Reexamination Certificate

active

07838829

ABSTRACT:
There is provided a charged particle beam device which can prevent a specimen from not being able to be observed due to entering of a part of a grid of a mesh in a field of view, each pixel of a scanning transmission electron microscope image is displayed on the basis of a gray value of a predetermined gradation scale. In the case where the number of pixels of a predetermined gray value is less than a predetermined percentage, it is decided that a mesh image is not included in the scanning transmission electron microscope image. In the case where the number of pixels of the predetermined gray value is not less than a predetermined percentage, it is judged that the mesh image is included in the scanning transmission electron microscope image. In the case where the mesh image is included in the scanning transmission electron microscope image, a magnification is increased, a specimen stage is moved, or beam deflection is performed, and when the mesh image is not anymore included in the scanning transmission electron microscope image, the predetermined gradation scale is converted to other gradation scale and a scanning transmission electron microscope image is obtained.

REFERENCES:
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patent: 7145156 (2006-12-01), Abe
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Japanese Office Action dated Mar. 31, 2009 (Six (6) pages).

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