Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1998-01-09
2000-04-04
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
250398, 250397, G01N 2100, G01N 2300
Patent
active
060464577
ABSTRACT:
A charged particle beam apparatus having a cold trap positioned in proximity to components, such as a shaping aperture and a backscattered electrons detector, to which contaminants tend to migrate to adversely affect the functions of these components. As a coolant is passed through the cold trap, the contaminants condense on the cold trap and away from the shaping aperture and the backscattered electrons detector.
REFERENCES:
patent: 3008044 (1961-11-01), Buchhold
patent: 3558878 (1971-01-01), Neuhaus
patent: 3624390 (1971-11-01), Watanabe
patent: 3916201 (1975-10-01), Herrmann et al.
patent: 4179605 (1979-12-01), Watanabe et al.
patent: 4214166 (1980-07-01), Dietrich et al.
patent: 4667108 (1987-05-01), Walker et al.
patent: 4766313 (1988-08-01), Homma et al.
patent: 4803369 (1989-02-01), Otaka
patent: 4833330 (1989-05-01), Swann et al.
patent: 5355683 (1994-10-01), Taylor
patent: 5435379 (1995-07-01), Moslehi et al.
patent: 5510624 (1996-04-01), Zaluzec
patent: 5539211 (1996-07-01), Ohtoshi et al.
patent: 5577552 (1996-11-01), Ebinuma et al.
Bohnenkamp Carl E.
Dziobkowski Chester T.
Anderson Bruce C.
International Business Machines - Corporation
Schnurmann H. Daniel
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