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Method for correcting astigmatism and focusing in charged partic

Radiant energy – Inspection of solids or liquids by charged particles – Methods
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Method for correcting distortions in electron backscatter...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Method for detecting an element in a sample

Radiant energy – Inspection of solids or liquids by charged particles – Methods
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Method for detecting and examining slightly irregular surface st

Radiant energy – Inspection of solids or liquids by charged particles
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Method for detecting carrier profile

Radiant energy – Inspection of solids or liquids by charged particles – Methods
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Method for detecting geometrical-optical aberrations

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Method for detecting object picture by electron beam

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Method for detecting over-etch defects

Radiant energy – Inspection of solids or liquids by charged particles – Methods
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Method for determining a profile quality grade of an...

Radiant energy – Inspection of solids or liquids by charged particles – Methods
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Method for determining depression/protrusion of sample and...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Method for determining depression/protrusion of sample and...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Method for determining intracellular mineral levels

Radiant energy – Inspection of solids or liquids by charged particles – Methods
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Method for determining opened/unopened semiconductor...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Method for determining pore characteristics in porous materials

Radiant energy – Inspection of solids or liquids by charged particles – Methods
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Method for determining the aberration coefficients of the...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Method for determining the distance of a near-field probe...

Radiant energy – Inspection of solids or liquids by charged particles
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Method for determining the presence of thin insulating films

Radiant energy – Inspection of solids or liquids by charged particles – Methods
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Method for determining the quality of a lubricant layer on a mag

Radiant energy – Inspection of solids or liquids by charged particles – Methods
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Method for direct measurement of absorbed dose rate of beta-rays

Radiant energy – Inspection of solids or liquids by charged particles – Including a radioactive source
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Method for electron beam-initiated coating for application...

Radiant energy – Inspection of solids or liquids by charged particles – Methods
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