Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1996-09-09
1998-08-11
Anderson, Bruce
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250310, 250396R, H01J 3710
Patent
active
057930414
ABSTRACT:
In a method for correcting astigmatism and focusing in a charged particle optical lens-barrel, according to the invention, Fourier transformation data items are obtained, which indicate images obtained by scanning a sample with a charged particle beam when the focal distance of an objective lens is set to each of at least two different values. Then, the configuration of the section of the beam is determined on the basis of the difference between the data items, thereby performing astigmatism correction and focusing. As a result, a charged particle microscope can perform highly accurate astigmatism correction and focusing during observation, irrespective of the surface configuration of the sample or the beam section on the sample.
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Ogasawara Munehiro
Onoguchi Kazunori
Tamamushi Shuichi
Wakamori Hideo
Anderson Bruce
Kabushiki Kaisha Toshiba
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