Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1991-10-15
1993-01-26
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250306, H01J 3700
Patent
active
051824523
ABSTRACT:
There is provided a method for determining the presence of an insulating film on the surface of an electrically conductive material. In this method, an electrically conductive probe is brought into contact with the surface of a specimen, and a voltage is applied between the probe and the surface of the specimen. A tunneling current which flows through the probe is detected and amplified, while controlling the distance between the probe and the surface of the specimen to ensure a substantially constant tunneling current.
REFERENCES:
patent: 4616340 (1986-10-01), Hagashi et al.
patent: 4902892 (1990-02-01), Okayama et al.
patent: 4906840 (1990-03-01), Zdeblick et al.
patent: 4954704 (1990-09-01), Elings et al.
patent: 4965865 (1990-10-01), Trenary
patent: 4988635 (1991-01-01), Ajika et al.
patent: 5015850 (1991-05-01), Zdeblick et al.
T. Tamaki et al. Preprint of 37th Spring Associated Meeting of Japan Society of Applied Physics (with partial English translation) Lecture No. 30a-Sc-23.
Y. Nakagawa et al. Scanning Tunneling Microscopy of Silicon Surfaces in Air: Observation of Atomic Images T. Vac. Sci. Tech. A, vol. 8(1), Jun./Feb. 1990, pp. 262-265.
R. Williams et al., "Wetting of Thin Layers of SiO.sub.2 by Water", Appl. Physics Lttrs., vol. 25, No. 10, Nov. 15, 1974, pp 531-532.
T. Ishigoro et al. Cds Bolometer for Detecting Heat Pulses in a Magnetic Field, Appl. Physics Lttrs., vol. 25, No. 10, Nov. 15, 1974, p. 533.
Niwa Masaaki
Okada Shozo
Anderson Bruce C.
Matsushita Electric - Industrial Co., Ltd.
LandOfFree
Method for determining the presence of thin insulating films does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for determining the presence of thin insulating films, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for determining the presence of thin insulating films will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1414123