Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2006-12-05
2009-06-09
Vanore, David A (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S306000, C250S307000, C250S310000
Reexamination Certificate
active
07544939
ABSTRACT:
A lens of particle-optical apparatus, such as the objective lens, suffers from aberrations. As is already known since decades Ronchigrams can be used to determine these aberrations of particle-optical lenses.Such methods rely e.g. on the determination of the 2ndderivative of the aberration function on the basis of local magnification in one or a set of Ronchigrams. Being dependent on the 2ndderivative the mathematics of these methods allow only (infinitesimal) small shifts between the Ronchigrams. However, this implies that e.g. the spatial quantization noise of the camera recording the Ronchigrams results in a large error. These conflicting requirements limit the accuracy and thus the usefulness of the known methods.The invention describes a set of algorithms which result in an improved method to quantify the lens aberration coefficients using a set of Ronchigrams.
REFERENCES:
patent: 5581347 (1996-12-01), Le Saux et al.
patent: 6552340 (2003-04-01), Krivanek et al.
patent: 6858844 (2005-02-01), Zach
M. Haider, S. Uhlemann and J. Zach “Upper Limits for the Residual Aberrations of a High-Resolution Aberration-Corrected STEM,” Ultramicroscopy 81 (2000) p. 163-175.
Kok Christiaan
Rieger Bernd
van der Zande Marinus Johannes
FEI Company
Griner David
Maskell Michael
Scheinberg Michael O.
Scheinberg & Griner, LLLP
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