Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-04-05
2008-10-28
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S311000, C250S307000, C250S492300, C250S492220, C250S550000, C382S141000, C382S151000, C382S216000, C382S296000
Reexamination Certificate
active
07442930
ABSTRACT:
A method is provided for correcting magnetic field distortions in an electron backscatter diffraction (EBSD) pattern. An EBSD pattern is firstly generated from a sample placed within an electron microscope. A predetermined representation of a magnetic field in the microscope is used to calculate the trajectories of electrons in the microscope, for different emergence angles. A corrected EBSD pattern is then calculated using the calculated trajectories, the corrected EBSD pattern representing the EBSD pattern if the microscope magnetic field were substantially absent.
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Berman Jack I.
Logie Michael J
Oxford Instruments Analytical Limited
Vern Maine & Associates
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