Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2005-02-22
2005-02-22
Wells, Nikita (Department: 2883)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000
Reexamination Certificate
active
06858844
ABSTRACT:
The invention relates to a method for determining geometrical-optical aberrations up to and including 3rd order in particle-optical, probe-forming systems, in particular scanning electron microscopes, comprising an essentially punctiform source, lenses, an object, and a detector, the image being recorded, the process being repeated with an overfocussed and an underfocussed beam, the images being transformed in Fourier space, the transformation of the overfocussed image, and the underfocussed image is divided by the transformed focussed image. The results are reverse transformed, and the brightness profiles of the probes, the images of the source, are determined in overfocus and underfocus. The asymmetry, the width and/or the curvature of the profile being determined in the center, and the image aberration being determined from the differences.
REFERENCES:
patent: 5654547 (1997-08-01), Coene et al.
patent: 5753913 (1998-05-01), Coene et al.
patent: 6067164 (2000-05-01), Onoguchi et al.
patent: 6476398 (2002-11-01), Xu et al.
patent: 197 39 290 (1999-03-01), None
patent: 2 305 324 (1997-04-01), None
Ogasawara et al., Japanese Journal of Applied Physics, vol. 38, No. 2A, pp. 957-960 )1999).
Zach et al., Nuclear Instruments and Methods in Physics Research, vol. A363, No. 1, pp. 316-325 (1995).
Birch & Stewart Kolasch & Birch, LLP
Kalivoda Christopher M.
Wells Nikita
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