Method for detecting object picture by electron beam

Details Method for detecting object picture by electron beam Method for detecting object picture by electron beam

1978-11-21

1980-08-26

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, G01N 2300

Patent

active

042197317

ABSTRACT:
A method is disclosed in which an object picture such as an integrated circuit pattern is precisely and exactly detected at high speed by the use of an electron beam. At least two kinds of signals obtained by irradiating an object with an electron beam are detected and subjected to an adding/subtracting operation and a resulting signal is used to detect the object picture. Thus, a satisfactory S/N ratio can be obtained. The method is applicable to the inspection of a mask used for integrated circuits.

REFERENCES:
patent: 3329813 (1967-07-01), Hashimoto
patent: 3351755 (1967-11-01), Hasler
patent: 3381132 (1968-04-01), Okano
patent: 3549999 (1970-12-01), Norton
patent: 3597607 (1971-08-01), Campbell et al.

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