Radiant energy – Inspection of solids or liquids by charged particles
Patent
1994-06-06
1996-05-14
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
250307, 356237, H01J 3700
Patent
active
055170277
ABSTRACT:
Method for detecting and examining a slightly irregular surface state is provided which includes the steps of: illuminating a surface of a sample with light beam for detecting the slightly irregular surface state; observing a variation of the light beam occurring due to the slightly irregular surface state to specify the location of the slightly irregular surface state in an x-y plane of the sample; making the location of a probe needle of a scanning probe microscope and the location of the slightly irregular surface state on the sample coincide with each other; and measuring a three-dimensional image of the slightly irregular surface state by means of the scanning probe microscope. The scanning probe microscope for use in the aforementioned method and a method for fabricating a semiconductor device or a liquid crystal display device which utilizes the aforementioned method are also provided.
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Fujino Naohiko
Hattori Nobuyoshi
Hori Koichiro
Karino Isamu
Kobayashi Junji
Anderson Bruce C.
Mitsubishi Denki & Kabushiki Kaisha
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