Method for electron beam-initiated coating for application...

Details Method for electron beam-initiated coating for application... Method for electron beam-initiated coating for application...

2007-02-20

2007-02-20

Berman, Jack (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S304000

Reexamination Certificate

active

10711644

ABSTRACT:
A method for preparing a specimen for application of microanalysis thereto includes forming an initial conductive layer over a defined area of interest on a semiconductor substrate, the initial conductive layer formed through an electron beam deposition process. A volume of substrate material surrounding the area of interest is removed, thereby forming the specimen, including said area of interest and said initial conductive layer over the area of interest. The specimen is then removed from the bulk substrate material.

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