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Automatic electron beam alignment and astigmatism correction in

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Automatic focusing and astigmatism correction for electron beam

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Automatic focusing apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Automatic focusing apparatus for scanning electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Automatic focusing system for scanning electron microscope...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Backscattered-electron detection systems and associated methods

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Beam adjusting sample, beam adjusting method and beam...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Beam alignment in a lower column of a scanning electron...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Beam current normalization in an X-ray microanalysis instrument

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Beam evaluation

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Beam guiding arrangement, imaging method, electron...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Capping layer to impede atom ejection

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Cathode, electron beam emission apparatus using the same, and me

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Charge-control method and apparatus for electron beam imaging

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Charge-control pre-scanning for e-beam imaging

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Charged particle apparatus having a canted column

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Charged particle beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Charged particle beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Charged particle beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Charged particle beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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