Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

2007-05-29

2007-05-29

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S305000, C250S505100, C378S034000

Reexamination Certificate

active

11437638

ABSTRACT:
The charged particle beams is provided, which can analyze contamination of the inner wall of the system without being disassembled and supply information on appropriate maintenance timing. The contamination level of the inner wall of the system is identified by measuring the spectrum of the X-rays emitted from the inner wall due to irradiation of a charged particle beam or a recoil electron.

REFERENCES:
patent: 6545272 (2003-04-01), Kondo
patent: 7064324 (2006-06-01), Onishi
patent: 9-245716 (1997-09-01), None
patent: 2002-248338 (2002-09-01), None

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