Beam adjusting sample, beam adjusting method and beam...

Details Beam adjusting sample, beam adjusting method and beam... Beam adjusting sample, beam adjusting method and beam...

2007-10-02

2007-10-02

Vanore, David A. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

Reexamination Certificate

active

10679416

ABSTRACT:
A beam adjusting sample having a flat surface being like a plate and having two edges orthogonal to each other is employed. A beam is applied to the beam adjusting sample to detect an amount of the beam passing through the beam adjusting sample. The beam vertically scans the two edges.

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Hitoshi Nishimura: Japanese Patent Office Examiner—Notification of Reasons for Refusal for JP Patent Application No. 2002-298359: Art 29-1, Art. 29-2, Art 38.

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