Automatic focusing and astigmatism correction for electron beam

Details Automatic focusing and astigmatism correction for electron beam Automatic focusing and astigmatism correction for electron beam

1993-02-11

1994-05-17

Dzierzynski, Paul M.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, 250396R, 250396ML, 250397, H01J 3721

Patent

active

053130626

ABSTRACT:
A method of automatically and accurately accomplishing focusing and astigmatism correction in an electron beam apparatus such as a scanning electron microscope. The electron beam is raster scanned to scan a specimen in two dimensions. If the obtained signal intensity distribution curve has only one peak, the peak position P2 of a curve obtained by raster scanning the beam vertically is detected. The peak position P1 of a curve obtained by raster scanning the beam horizontally is detected. An intermediate position P0 is calculated, using the formula

REFERENCES:
patent: 4199681 (1980-04-01), Namae
patent: 5130450 (1992-07-01), Yamada et al.

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