Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-11-14
2006-11-14
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S3960ML
Reexamination Certificate
active
07135677
ABSTRACT:
An electron microscopy system comprises an objective lens (19) which images a field displaceable in x-direction on a fixed beam axis (17). The objective lens has an astigmatic effect which is compensated for by a beam shaper (63) on the fixed axis. Furthermore, lens configurations can selectively act on the primary electron beam or the secondary electron beam.
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Haider Max
Kienzle Oliver
Knippelmeyer Rainer
Müller Heiko
Uhlemann Stephan
Carl Zeiss NTS GmbH
Jones Day
Leybourne James J.
Wells Nikita
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