Reference signal generating configuration for an...
Refractive-index measurement system and method for measuring...
Reticle focus measurement system using multiple...
Reticle focus measurement system using multiple...
Rotary encoder apparatus
Rotary position measuring system
Rotation and translation measurement
Rotation and translation measurement
Rotation and translation measurement
Runout characterization
Sample inclination measuring method
Scale reading apparatus
Scan error correction in low coherence scanning interferometry
Scanning exposure method and apparatus, and device...
Scanning interferometer for aspheric surfaces and wavefronts
Scanning interferometer for aspheric surfaces and wavefronts
Scanning interferometer for aspheric surfaces and wavefronts
Scanning interferometer for aspheric surfaces and wavefronts
Scanning interferometric methods and apparatus for measuring...
Scanning interferometric near-field confocal microscopy with...