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Reference signal generating configuration for an...

Optics: measuring and testing – By light interference – For dimensional measurement
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Refractive-index measurement system and method for measuring...

Optics: measuring and testing – By light interference – For dimensional measurement
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Reticle focus measurement system using multiple...

Optics: measuring and testing – By light interference – For dimensional measurement
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Reticle focus measurement system using multiple...

Optics: measuring and testing – By light interference – For dimensional measurement
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Rotary encoder apparatus

Optics: measuring and testing – By light interference – For dimensional measurement
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Rotary position measuring system

Optics: measuring and testing – By light interference – For dimensional measurement
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Rotation and translation measurement

Optics: measuring and testing – By light interference – For dimensional measurement
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Rotation and translation measurement

Optics: measuring and testing – By light interference – For dimensional measurement
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Rotation and translation measurement

Optics: measuring and testing – By light interference – For dimensional measurement
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Runout characterization

Optics: measuring and testing – By light interference – For dimensional measurement
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Sample inclination measuring method

Optics: measuring and testing – By light interference – For dimensional measurement
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Scale reading apparatus

Optics: measuring and testing – By light interference – For dimensional measurement
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Scan error correction in low coherence scanning interferometry

Optics: measuring and testing – By light interference – For dimensional measurement
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Scanning exposure method and apparatus, and device...

Optics: measuring and testing – By light interference – For dimensional measurement
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Scanning interferometer for aspheric surfaces and wavefronts

Optics: measuring and testing – By light interference – For dimensional measurement
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Scanning interferometer for aspheric surfaces and wavefronts

Optics: measuring and testing – By light interference – For dimensional measurement
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Scanning interferometer for aspheric surfaces and wavefronts

Optics: measuring and testing – By light interference – For dimensional measurement
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Scanning interferometer for aspheric surfaces and wavefronts

Optics: measuring and testing – By light interference – For dimensional measurement
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Scanning interferometric methods and apparatus for measuring...

Optics: measuring and testing – By light interference – For dimensional measurement
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Scanning interferometric near-field confocal microscopy with...

Optics: measuring and testing – By light interference – For dimensional measurement
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