Rotary encoder apparatus

Details Rotary encoder apparatus Rotary encoder apparatus

2011-06-28

2011-06-28

Chowdhury, Tari (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07969579

ABSTRACT:
Rotary encoder apparatus is described that comprises one or more readheads and a radial scale. Each of the one or more readheads includes a light emitting portion for illuminating the radial scale and a light detecting portion for detecting interference fringes formed at a readhead analyzer plane. The readhead analyzer plane is tilted relative to the plane containing the radial scale. In a preferred embodiment, the readhead analyzer plane is tilted towards the center of rotation of the rotary encoder apparatus by the angle.

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Pettigrew; “Analysis of Grating Imaging and Its Application to Displacement Metrology;”SPIE 1stEuropean Congress on Optics Applied to Metrology; 1977; vol. 136; pp. 325-331.

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