Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2011-08-23
2011-08-23
Chowdhury, Tarifur R (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
08004688
ABSTRACT:
In general, in one aspect, the invention features apparatus that includes a broadband scanning interferometry system including interferometer optics for combining test light from a test object with reference light from a reference object to form an interference pattern on a detector, wherein the test and reference light are derived from a common light source. The interferometry system further includes a scanning stage configured to scan an optical path difference (OPD) between the test and reference light from the common source to the detector and a detector system including the detector for recording the interference pattern for each of a series of OPD increments, wherein the frequency of each OPD increment defines a frame rate. The interferometer optics are configured to produce at least two monitor interferometry signals each indicative of changes in the OPD as the OPD is scanned, wherein the detector system is further configured to record the monitor interferometry signals. The apparatus also includes an electronic processor electronically coupled to the detection system and scanning stage and configured to determine information about the OPD increments with sensitivity to perturbations to the OPD increments at frequencies greater than the frame rate.
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Colonna De Lega Xavier
Davidson Mark
de Groot Peter
Deck Leslie L.
Liesener Jan
Chowdhury Tarifur R
Fish & Richardson P.C.
Hansen Jonathan M
Zygo Corporation
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