Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-05-15
2007-05-15
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
11064731
ABSTRACT:
Interferometric scanning method(s) and apparatus for measuring optics either having aspherical surfaces or that produce aspherical wavefronts. A test optic is aligned and moved with respect to a scanning axis relative to the origin of a known spherical wavefront that is generated with a reference surface to intersect the test optic at the apex of the aspherical surface and at radial zones where the spherical wavefront and the aspheric surface possess common tangents. The test surface is imaged onto a space resolving detector to form interferograms containing phase information about the differences in optical path length between the reference surface and the test surface while the axial distance which the test optic moves relative to the spherical reference surface is interferometrically measured. The deviation in the shape of the aspheric surface from its design in a direction normal to the aspheric surface is determined and reported.
REFERENCES:
patent: 4697927 (1987-10-01), Ono
patent: 5004346 (1991-04-01), Kuhel
patent: 5187539 (1993-02-01), Adachi et al.
patent: 5416586 (1995-05-01), Tronolone et al.
patent: 5625454 (1997-04-01), Huang et al.
patent: 5844670 (1998-12-01), Morita et al.
patent: 6222621 (2001-04-01), Taguchi
patent: 6312373 (2001-11-01), Ichihara
patent: 6456382 (2002-09-01), Ichihara et al.
patent: 6714308 (2004-03-01), Evans et al.
patent: 6781700 (2004-08-01), Kuchel
patent: 6879402 (2005-04-01), Kuchel
patent: 6972849 (2005-12-01), Küchel
Supplementaryeuropean Search Report for EPO Application No. 02789681.0,Jul. 27, 2006.
Lin, Ding-tin, and Wang, Der-Shen. “Profile Measurement Of An Aspheric Cylindrical Surface From Retroreflection.” Applied Optics, vol. 30, No. 22 (Aug. 1, 1991): pp. 3200-3204.
Dürband, B. et al., “High Precision Interferometric Measurements of Lens Elements.” Fringe ″97: Proceedings of the 3rd International Workshop on Automatic Processing of Fringe Patterns Held in Bremen, Germany, Sep. 15-17, 1997. pp. 473-480.
V. Greco, et al., “Interferometric testing of weak aspheric surfaces versus design specifications”, Optik, 87, No. 4 (1991), pp. 159-162.
Caufield Francis J.
Lyons Michael A.
Toatley , Jr. Gregory J.
Zygo Corporation
LandOfFree
Scanning interferometer for aspheric surfaces and wavefronts does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scanning interferometer for aspheric surfaces and wavefronts, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning interferometer for aspheric surfaces and wavefronts will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3801361