Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2011-06-21
2011-06-21
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07965393
ABSTRACT:
A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead includes primary fibers that provide reference mark primary signals processed to generate a reference signal with accuracy of approximately 0.2 microns. The readhead may include secondary fibers used to generate reference mark secondary signals processed to generate a reference signal with accuracy of approximately 20 nanometers. Spatial filter masks configured for the secondary fiber optic receiver channels provide two spatially periodic secondary signals arising from interference fringes outside of the receiving area of the primary fiber optic receiver channels. The secondary signals are out of phase with one another and their spatial frequency is higher than that of the primary signals. A signal crossing of the reference mark secondary signals is identified that is spatially adjacent to a signal crossing of the reference mark primary reference signals.
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Harsila Scott
Masreliez Karl Gustav
Tobiason Joseph Daniel
Zwilling Avron
Christensen O'Connor Johnson & Kindness PLLC
Lyons Michael A
Mitutoyo Corporation
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