Sample inclination measuring method

Details Sample inclination measuring method Sample inclination measuring method

2007-07-17

2007-07-17

Lee, Hwa (Andrew) (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S512000

Reexamination Certificate

active

10465623

ABSTRACT:
A sample inclination measuring method rotates, by a predetermined angle with respect to an interferometer apparatus, a columnar member having a leading end face in a planar form while the columnar member is held by a clamping apparatus, detects a relative angle between a reference surface of the interferometer apparatus and the leading end face at each of two rotational positions, and measures the inclination of the axis of the columnar member by using a predetermined arithmetic expression according to thus detected two angles.

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patent: 6100980 (2000-08-01), Ichikawa
patent: 6707559 (2004-03-01), Ge
patent: 6947149 (2005-09-01), Kobayashi et al.
patent: 6999181 (2006-02-01), Dulman

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