Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-02-16
2008-10-07
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07433047
ABSTRACT:
Runout characterization is performed on a moving body by positioning a light source and optical sensor at a nominal distance from the moving body, with a beam directed from the light source against a surface of the moving body. The reflected light is detected at a sampling rate with the optical sensor as the moving body moves, and a data stream of the measurements over time is stored. In the case where an interferometer is used as the optical sensor, relative distance measurements are made. The data stream is analyzed to detect repeating signatures in the data stream, where the signatures represent features on the surface of the moving body. At least one of the features is selected as a reference, and the data stream is processed into segments based on the reference, where each segment represents one period of motion of the moving body. The data segments are overlaid on top of each other to produce ordered sets of data points within the segments. Each ordered set of data points is individually averaged and reported as repeatable runout. The average of each ordered set of data points is subtracted from the data points of each set to produce normalized ordered sets of data points. The variances within the normalized ordered sets of data points are reported as a measure of the non-repeatable runout of the moving body.
REFERENCES:
patent: 3947128 (1976-03-01), Weinberger et al.
patent: 6556941 (2003-04-01), Mallory et al.
patent: 2008/0063245 (2008-03-01), Benkley et al.
Brown Kyle A.
Mueller Dieter E.
Peale David R.
KLA-Tencor Corporation
Luedeka Neely & Graham P.C.
Lyons Michael A
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