Compensation for effects of mismatch in indices of...

Compensation for errors in off-axis interferometric...

Compensation for geometric effects of beam misalignments in...

Compensation of effects of atmospheric perturbations in...

Compensation of refractivity perturbations in an...

Compound reference interferometer

Conic constant measurement methods for refractive microlenses

Control of position and orientation of sub-wavelength...

Coordinate measuring machine and a method for correcting...

Coordinate measuring machine for measuring structures on a...

Copper CMP flatness monitor using grazing incidence...

Correction of scanning errors in interferometric profiling

Cyclic error compensation in interferometry systems

Cyclic error compensation in interferometry systems

Cyclic error reduction in average interferometric position...