Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-08-03
2009-11-10
Connolly, Patrick J (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S498000
Reexamination Certificate
active
07616322
ABSTRACT:
An interference signal S(t) is provided from interference between two beams directed along different paths. The signal S(t) is indicative of changes in an optical path difference n{tilde over (L)}(t) between the different paths, where n is an average refractive index along the different paths, {tilde over (L)}(t) is a total physical path difference between the different paths, and t is time. An error signal is provided to reduce errors in an estimate of {tilde over (L)}(t). The error signal is derived at least in part based on one or more collective properties of a distribution of multi-dimensional values. At least one of the multi-dimensional values in the distribution is generated from a plurality of samples of the signal S(t) (e.g., samples of the signal captured at different times).
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Demarest Frank C.
Field Alan H.
Hill Henry A.
Connolly Patrick J
Fish & Richardson P.C.
Zygo Corporation
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