Coordinate measuring machine for measuring structures on a...

Details Coordinate measuring machine for measuring structures on a... Coordinate measuring machine for measuring structures on a...

2011-06-14

2011-06-14

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07961334

ABSTRACT:
A coordinate measuring machine (1) for measuring structures (3) on a substrate (2) including a measurement table (20) movable in the X-coordinate direction and in the Y-coordinate direction, a measurement objective (9), at least one laser interferometer (24) for determining the position of the measurement table (20) and the measurement objective (9) wherein the measurement table (20), the measurement objective (9) and the at least one laser interferometer (24) are arranged in a vacuum chamber (50).

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“Pattern Placement Metrology for Mask Making” Dr. Carola Blasing Leic Microsystems AG Semicon Education Program, Geneva, Mar. 31, 1998.

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