Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2011-04-19
2011-04-19
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07929149
ABSTRACT:
A method and a coordinate measuring machine (1) are provided, wherein the non-linearities of an interferometer (24) can be corrected. A measuring stage (20) traversable in a plane (25a) is provided for measurement. The substrate (2) is placed in a measuring stage (20); wherein the position of the measuring stage (20) along each of the motion axes is determined by at least one interferometer (24) in each case. A computer (16) is provided for compensating the non-linearity inherent in each of the interferometers (24), wherein the position of the measuring stage (20) to be determined by the interferometers (24) is arranged along a trajectory (52, 60, 67) of the measuring stage (20), which is composed at least partially of components of the axes.
REFERENCES:
patent: 6008902 (1999-12-01), Rinn
patent: 6137574 (2000-10-01), Hill
patent: 6738143 (2004-05-01), Chu
patent: 6891624 (2005-05-01), Hill
patent: 7336369 (2008-02-01), Eckes et al.
patent: 7548321 (2009-06-01), Rinn
patent: 2002/0186376 (2002-12-01), Brown
patent: 2007/0103667 (2007-05-01), Ferber et al.
patent: 2007/0268495 (2007-11-01), Rinn
patent: 2007/0268496 (2007-11-01), Boesser et al.
Bobroff, N., “Residual errors in laser interferometry from air turbulence and nonlinearity,” Applied Optics, vol. 26, No. 13, Jul. 1, 1987, pp. 2676-2682.
Houston Eliseeva LLP
Lyons Michael A
Vistec Semiconductor Systems GmbH
LandOfFree
Coordinate measuring machine and a method for correcting... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Coordinate measuring machine and a method for correcting..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Coordinate measuring machine and a method for correcting... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2695296