Compensation of refractivity perturbations in an...

Optics: measuring and testing – By light interference – For dimensional measurement

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C356S517000

Reexamination Certificate

active

10701759

ABSTRACT:
In general, in one aspect, the invention features a method that includes directing a first measurement beam along a first path contacting a measurement object to determine a first interferometric phase related to a position of a measurement object, directing a second measurement beam along a second path contacting the measurement object to determine an second interferometric phase related to the position of the measurement object, and determining a contribution to the first interferometric phase due to perturbations in refractivity along the first path based on the second interferometric phase.

REFERENCES:
patent: 4948254 (1990-08-01), Ishida
patent: 5114234 (1992-05-01), Otsuka
patent: 5404222 (1995-04-01), Lis
patent: 5408318 (1995-04-01), Slater
patent: 5483343 (1996-01-01), Iwamoto et al.
patent: 5491550 (1996-02-01), Dabbs
patent: 5715057 (1998-02-01), Bechstein et al.
patent: 5757160 (1998-05-01), Kreuzer
patent: 5757489 (1998-05-01), Kawakami
patent: 5764361 (1998-06-01), Kato et al.
patent: 5764362 (1998-06-01), Hill et al.
patent: 5801832 (1998-09-01), Van Den Brink
patent: 5877843 (1999-03-01), Takagi et al.
patent: 5991033 (1999-11-01), Henshaw et al.
patent: 6020964 (2000-02-01), Loopstra
patent: 6040096 (2000-03-01), Kakizaki
patent: 6046792 (2000-04-01), Van Der Werf
patent: 6134007 (2000-10-01), Naraki
patent: 6160619 (2000-12-01), Magome
patent: 6219144 (2001-04-01), Hill et al.
patent: 6304382 (2001-10-01), Simon
patent: 6327039 (2001-12-01), de Groot et al.
patent: 6330065 (2001-12-01), Hill
patent: 6417927 (2002-07-01), de Groot
patent: 6541759 (2003-04-01), Hill
patent: 6839141 (2005-01-01), Hill
patent: 6842256 (2005-01-01), Hill
patent: 2002/0001086 (2002-01-01), de Groot
patent: 2002/0048026 (2002-04-01), Isshiki et al.
patent: 2006/0256346 (2006-11-01), Hill
Norman Bobroff, “Residual errors in laser interferometry from air turbulance and nonlinearity”,Applied Optics, vol. 26, No. 13, pp. 2676-2682 (Jul. 1, 1987).
Bennett, S.J. “A double-passed michelson interferometer.” Optics Communications, 4:6, pp. 428.430, 1972.
Bobroff, N. “Recent advances in displacement measureing interferometry.” Meas. Sci. Technol. 4, pp. 907-926, 1993.
Oka, K. et al. “Polarization heterodyne interferometry using another local oscillator beam.” Optics Communication, 92, pp. 1-5, 1992.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Compensation of refractivity perturbations in an... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Compensation of refractivity perturbations in an..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Compensation of refractivity perturbations in an... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3800595

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.