Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-09-11
2007-09-11
Skovholt, Jonathan (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S517000
Reexamination Certificate
active
10701759
ABSTRACT:
In general, in one aspect, the invention features a method that includes directing a first measurement beam along a first path contacting a measurement object to determine a first interferometric phase related to a position of a measurement object, directing a second measurement beam along a second path contacting the measurement object to determine an second interferometric phase related to the position of the measurement object, and determining a contribution to the first interferometric phase due to perturbations in refractivity along the first path based on the second interferometric phase.
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Fish & Richardson P.C.
Skovholt Jonathan
Zygo Corporation
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