Cyclic error compensation in interferometry systems

Details Cyclic error compensation in interferometry systems Cyclic error compensation in interferometry systems

2005-09-27

2005-09-27

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

95

Reexamination Certificate

active

06950192

ABSTRACT:
The invention features a method including: (i) providing an interference signal S(t) from two beams derived from a common source and directed along different paths, wherein the signal S(t) is indicative of changes in an optical path difference n{tilde over (L)}(t) between the different paths, where n is an average refractive index along the different paths, {tilde over (L)}(t) is a total physical path difference between the different paths, and t is time; (ii) providing coefficients representative of one or more errors that cause the signal S(t) to deviate from an ideal expression of the form A1cos(ωRt+φ(t)+ζ1), where A1and ζ1are constants, ωRis an angular frequency difference between the two beams, and φ(t)=nk{tilde over (L)}(t), with k=2π/λ and λ equal to a wavelength for the beams; (iii) calculating a quadrature signal {tilde over (S)}(t) based on the signal S(t); and (iv) reducing the deviation of S(t) from the ideal expression using an error signal Sψ(t) generated from the coefficients and error basis functions derived from the signals S(t) and {tilde over (S)}(t).

REFERENCES:
patent: 4413908 (1983-11-01), Abrams et al.
patent: 4948254 (1990-08-01), Ishida
patent: 5151749 (1992-09-01), Tanimoto et al.
patent: 5249016 (1993-09-01), Tanaka
patent: 5331400 (1994-07-01), Wilkening et al.
patent: 5404222 (1995-04-01), Lis
patent: 5432603 (1995-07-01), Sentoku et al.
patent: 5483343 (1996-01-01), Iwamoto et al.
patent: 5491550 (1996-02-01), Dabbs
patent: 5663793 (1997-09-01), de Groot
patent: 5724136 (1998-03-01), Zanoni
patent: 5757160 (1998-05-01), Dreuzer
patent: 5764361 (1998-06-01), Kato et al.
patent: 5790253 (1998-08-01), Kamiya
patent: 5850291 (1998-12-01), Tsutsui
patent: 5940180 (1999-08-01), Ostby
patent: 5969800 (1999-10-01), Makinouchi
patent: 6008902 (1999-12-01), Rinn
patent: 6020964 (2000-02-01), Loopstra et al.
patent: 6046792 (2000-04-01), Van Der Werf et al.
patent: 6134007 (2000-10-01), Naraki et al.
patent: 6137574 (2000-10-01), Hill
patent: 6160619 (2000-12-01), Magome
patent: 6181420 (2001-01-01), Badami et al.
patent: 6201609 (2001-03-01), Hill et al.
patent: 6252668 (2001-06-01), Hill
patent: 6271923 (2001-08-01), Hill
patent: 6304318 (2001-10-01), Matsumoto
patent: 6313918 (2001-11-01), Hill et al.
patent: 6687013 (2004-02-01), Isshiki et al.
patent: 6747744 (2004-06-01), Hill
patent: 6806961 (2004-10-01), Hill
patent: 2002/0048026 (2002-04-01), Isshiki et al.
patent: 40 31 291 (1992-06-01), None
patent: 0 514 579 (1992-11-01), None
patent: 0 689 030 (1995-12-01), None
patent: 7-351078 (1995-12-01), None
patent: 8-117083 (1996-04-01), None
patent: 10-260009 (1998-09-01), None
Badami V.G. et al., “Investigation of Nonlinearity in High Accuracy Heterodyne Laser Interferometry,” 1997 PROCEEDINGS, vol. 16, pp. 153-156.
Bennett, S.J.Optics Communications, 4:6, pp. 428-430, 1972.
Bobroff, N., “Recent Advances in Displacement Measuring Interferometry,” Measurement Science & Technology, vol. 4, No. 9, Sep. 1993, pp. 907-926.
Hines, B. et al., “Sub-Nanometer Laser Metrology—Some Techniques and Models,” Jet Propulsion Laboratory, California Institute of Technology, pp. 1195-1204.
Oka K. et al., “Polarization Heterodyne Interferometry Using Another Local Oscillator Beam,” Optics Communications, 92 (1992), 1-5.
Wu, C.M. et al., “Analytical Modeling of the Periodic Nonlinearity in Heterodyne Interferometry,” Applied Optics, vol. 37, No. 28, Oct. 1, 1998, pp. 6696-6700.
Norman Bobroff, “Residual errors in laser interferometry from air turbulence and nonlinearity”,Applied Optics, vol. 26, No. 13, pp. 2676-2682.
Mitsuru Tanaka, et al., “Linear Interpolation of Periodic Error in a Heterodyne Laser Interferometer at Subnanometer Levels”,IEEE Transactions on Instrumentation and Measurement, vol. 38, No. 2, pp. pp. 553-554 (Apr. 1989).
Chien-Ming Wu et al., “Analytical modeling of the periodic nonlinearity in heterodyne interferometry”,Applied Optics, vol. 37, No. 28, pp. 6696-6700 (Oct. 1, 1998).
Chien-Ming Wu et al., “Nonlinearity in measurements of length by optical interferometry”,Measurement Science and Technology, vol. 7, No. 1, pp. 62-68 (Jan. 1996).

Affiliated with

Also associated with

Rating

Cyclic error compensation in interferometry systems does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Cyclic error compensation in interferometry systems, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cyclic error compensation in interferometry systems will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3376224