Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-10-23
2007-10-23
Connolly, Patrick (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S500000
Reexamination Certificate
active
10872304
ABSTRACT:
In one aspect, the invention features a method, including using an interferometer in an interferometry system to produce an output beam comprising a phase related to an optical path difference between a path of a first beam and a path of a second beam, wherein the first beam contacts a measurement object at a first location and the first or second beam contacts the measurement object at a second location, and wherein the first and second locations are different, providing precalibrated information that accounts for contributions to the optical path difference caused by a deviation of the path of the first or second beam from a nominal beam path due to an imperfection of the measurement object at the first location and due to an imperfection of the measurement object at the second location, and determining a position of the measurement object with respect to at least one degree of freedom based on information derived from the output beam and the precalibrated information.
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Connolly Patrick
Zygo Corporation
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