Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-10-22
2010-11-02
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07826063
ABSTRACT:
In general, in a first aspect, the invention features a method that includes using an interferometry assembly to provide three different output beams, each output beam including an interferometric phase related to an optical path difference between a corresponding first beam and a corresponding second beam, each first beam contacting a measurement object at least once, monitoring the interferometric phases for each of the three different output beams, and deriving information about variations in the optical properties of a gas in the first beam paths from the three monitored phases.
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International Preliminary Report on Patentability issued on Jun. 24, 2009, corresponding to Int'l. Appln. No. PCT/US2007/088708, filed Dec. 21, 2007.
Chowdhury Tarifur
Cook Jonathon D
Fish & Richardson P.C.
Zygo Corporation
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