Electro-optical micrometer

Elliptical laser probe for shadow mask

Endpoint detector and method for measuring a change in wafer thi

Endpoint detector and method for measuring a change in wafer...

Exposure apparatus with thickness and defect detection

Far-field characterization of sub-wavelength sized apertures

Ferroelectric length measuring and moving target transducer with

Fiber length analyzer

Fiber optic imaging system for on-line monitoring

Fiber optic imaging system for on-line monitoring

Film thickness detector

Film thickness measurement of structures containing a scattering

Film thickness measuring apparatus

Film thickness measuring apparatus employing intensity compensat

Film thickness measuring apparatus employing microprojector of s

Film thickness measuring device and method

Film thickness-measuring apparatus

Film thickness-measuring apparatus using linearly polarized ligh

Finish meter for detecting and measuring a metal oxide coating t

Follow-up system for etch process monitoring