Film thickness-measuring apparatus using linearly polarized ligh

Details Film thickness-measuring apparatus using linearly polarized ligh Film thickness-measuring apparatus using linearly polarized ligh

1987-06-11

1989-07-25

Evans, F. L.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356369, G01B 1106

Patent

active

048507113

ABSTRACT:
A linearly polarized light beam is applied to the surface of a film and is reflected therefrom. The beam is then split into three light beams by three or four optical flats. These light beams are applied to photoelectric conversion devices after passing through analyzers with fixed analyzing angles. The photoelectric conversion devices convert the beams into electric signals representing the intensities of these light beams. Two ellipsometric parameters .psi. and .DELTA. are calculated from these three electric signals.

REFERENCES:
patent: 3994586 (1976-11-01), Sharkins et al.
patent: 4585348 (1986-04-01), Chastang et al.
patent: 4589776 (1986-05-01), Carver et al.
"Shingaku-Giho", vol. 82 OQE83-22.
Smith, Surface Science, vol. 56, No. 1, Jun. 1976, pp. 212-220.

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