Film thickness-measuring apparatus

Details Film thickness-measuring apparatus Film thickness-measuring apparatus

1988-07-22

1989-10-10

Scott, Jr., Leon

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356382, 356369, G01B 1106

Patent

active

048727580

ABSTRACT:
Circularly polarized light caused to be incident on a film surface is converted into three light beams by optical flats to obtain electrical signals corresponding to the intensities of the respective light beams. Two ellipsometric parameters .psi. and .DELTA. are claculated from these three electrical signals.

REFERENCES:
patent: 3985447 (1976-10-01), Aspnes
patent: 4606641 (1986-08-01), Yamada et al.
patent: 4623254 (1986-11-01), Imose
patent: 4695162 (1987-09-01), Itonaga et al.

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