Far-field characterization of sub-wavelength sized apertures

Details Far-field characterization of sub-wavelength sized apertures Far-field characterization of sub-wavelength sized apertures

1996-04-01

1997-09-02

Evans, F. L.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

25055924, G01B 1108

Patent

active

056637985

ABSTRACT:
A method and apparatus for determining the optical aperture diameter `d` of tips suitable for use in near-field scanning optical microscopy (NSOM). Several functional relationships are found between the far-field angular intensity distribution function I(.theta.) for light of wavelength `.lambda.` emitted out of the aperture, the angle `.theta.` being that formed between the direction of travel of the photon concerned and the perpendicular to the plane of the aperture. It is found that I(.theta.) depends sensitively on the aperture `d`. In one embodiment tip diameters can be measured for diameters in the range of .lambda./6<d<.lambda..

REFERENCES:
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Betzig, E., et al., "Breaking the Diffraction Barrier: Optical Microscopy on a Nanometric Scale," Science, vol. 251, pp. 1468-1470 (Mar. 22, 1991).
Bouwkamp, C.J., "On the Diffraction of Electromagnetic Waves by Small Circular Disks and Holes," Philips Research Reports, vol. 5, pp. 401-422 (Dec. 1950).
Bouwkamp, C.J., "Diffraction Theory," Rep. Prog. Phys., vol. 17, pp. 35-100 (1954).
Meixner, V.J., et al., "Strenge Theorie der Beugung ebener elektromagnetischer Wellen an der vollkommen leitenden Kreisscheibe und an der kreisformigen Offnung im vollkommen leitenden ebenen Schirm," Annalen der Physik, 7, pp. 157-168 (1950).

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