Film thickness measuring apparatus

Details Film thickness measuring apparatus Film thickness measuring apparatus

1997-09-03

1998-10-06

Evans, F. L.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

25055927, G01B 1106

Patent

active

058185968

ABSTRACT:
A sample is placed on a sample receiving stage for receiving the sample. The sample is transferred one at a time to a measuring table, and a thickness of a thin film formed on a surface of the sample is measured by irradiating the surface of the sample with a measuring light beam. A covering structure is disposed between the sample receiving stage and the measuring table to define a sample transfer space and a measuring space in which the measuring table is disposed. A high-purity purging gas containing only a very small amount of contaminants is supplied through purging gas supply devices into the transfer space and the measuring space covered with the covering structure.

REFERENCES:
patent: 5393624 (1995-02-01), Ushijima

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