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Vertical boat used for heat treatment of semiconductor wafer and

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
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Vertical diffusion furnace having improved gas flow

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
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Vertical furnace

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
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Vertical furnace for heat-treating semiconductor

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
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Vertical heat processing apparatus and heat processing...

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Reexamination Certificate

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Vertical heat treating equipment

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Reexamination Certificate

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Vertical heat treatment apparatus

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
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Vertical heat treatment apparatus

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent

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Vertical heat treatment apparatus

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
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Vertical heat treatment apparatus

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
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Vertical heat-treating apparatus and heat insulator

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
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Vertical heat-treating apparatus and heat insulator

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
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Vertical thermal processor

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
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Vertical thermal processor for semiconductor wafers

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
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Vertical type heat processing apparatus and vertical type...

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Reexamination Certificate

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Vertical type heat-treating apparatus

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent

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Vertical type heat-treatment apparatus

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
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