Vertical type heat-treatment apparatus

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart

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432 6, 432153, F27D 312

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active

049814362

ABSTRACT:
A vertical type heat-treatment apparatus of the invention has an adjusting mechanism capable of setting the flow rate of clean air flowing out from a first clean room to a second clean room to be a predetermined value. With this arrangement, the apparatus can be reduced in size and can prevent impurities from adhering to objects to be treated, thereby improving the productivity.

REFERENCES:
patent: 4610628 (1986-09-01), Mizushina
patent: 4649830 (1987-03-01), Tanaka
patent: 4699640 (1987-10-01), Suzuki et al.
patent: 4738618 (1988-04-01), Massey et al.
patent: 4923352 (1990-05-01), Tamura et al.
U.S. Pat. application, Ser. No. #07/249,780, Watanabe, claims 11, 15 and 16.

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