Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent
1995-03-31
1997-09-02
Bennett, Henry A.
Heating
Work feeding, agitating, discharging or conveying...
Removable furnace bottom section or kiln cart
432 5, 432 6, 432253, 219390, F27D 312
Patent
active
056624700
ABSTRACT:
A vertical furnace for processing wavers positioned on a support structure. The furnace comprises an inner sleeve, heating means and an outer sleeve. To support the inner sleeve on the support structure a support sleeve is provided engaging with its top and lower part of the inner sleeve and resting with its lower end on the support structure.
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patent: 5516283 (1996-05-01), Schrems
Berenpas Gerard
De Ridder Chris G.M.
Hasper Albert
Huussen Frank
ASM International N.V.
Bennett Henry A.
Wilson Gregory
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