4. Heating
  5. Work feeding, agitating, discharging or conveying...
  6. Removable furnace bottom section or kiln cart
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Semiconductor furnace for reducing particulates in a quartz tube

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent

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Semiconductor furnace processing vessel base

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent

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Semiconductor furnace processing vessel base

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent

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Semiconductor processing furnace heating subassembly

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent

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Semiconductor wafer boat and vertical heat treating system

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent

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Superstructure for kiln car

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent

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