Vertical heat treatment apparatus

Details Vertical heat treatment apparatus Vertical heat treatment apparatus

1991-07-23

1993-06-22

Chambers, A. Michael

Heating

Work feeding, agitating, discharging or conveying...

Removable furnace bottom section or kiln cart

432 6, 432 11, 432152, 432253, F27D 312

Patent

active

052212017

ABSTRACT:
A vertical heat treatment apparatus includes a casing, a vertical heat treatment furnace provided in the casing, a substrate holding unit mounted in the casing for holding substrates to be heat-treated in the vertical heat treatment furnace, a loading/unloading unit having a wafer boat for supporting the substrates, the loading/unloading unit being adapted to put the substrates in and take the same out of the vertical heat treatment furnace, and a transportation robot for moving the substrates between the substrate holding unit and the wafer boat. The vertical heat treatment apparatus further includes a clean air supplying unit for supplying clean air sideways to the wafers supported by the wafer boat when the loading/unloading unit is at an unloading position, a and duct for introducing air from the outside of the apparatus. The clean air supplying unit is provided with an air filter disposed opposed to the wafer boat. Air in a clean room whose pressure is set to be higher than the pressure in the casing is introduced into the clean air supplying unit through the duct.

REFERENCES:
patent: 4610628 (1986-09-01), Mizushina
patent: 4722683 (1988-02-01), Royer
patent: 4778382 (1988-10-01), Sakashida
patent: 4976613 (1990-12-01), Watanabe
patent: 5000682 (1991-03-01), Heidt et al.
patent: 5102331 (1992-04-01), Brekke et al.

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