Vertical heat treatment apparatus

Details Vertical heat treatment apparatus Vertical heat treatment apparatus

1996-09-04

1998-01-20

Bennett, Henry A.

Heating

Work feeding, agitating, discharging or conveying...

Removable furnace bottom section or kiln cart

432 5, 432 6, 432253, F27D 312

Patent

active

057095434

ABSTRACT:
The vertical heat treatment apparatus according to the present invention in which a substrate holder holding a plurality of substrates-to-be-processed at a vertical interval is mounted on the top of a cap for opening and closing the bottom opening (furnace throat) of a vertical heat treatment furnace through a heat insulation structure for a heat treatment in the uniform heat region in the furnace, the heat insulation structure comprising support rods for supporting the substrate holder, and a plurality of thin heat insulation plates having insertion holes in which the support rods are loosely inserted in, and supported by the support rods, separated from each other by spacers at a prescribed interval in the direction of height of the support rods, whereby the heat insulation structure can have a simple structure and have decreased heat capacities, and throughput can be improved.

REFERENCES:
patent: 4721459 (1988-01-01), Fitz
patent: 5310339 (1994-05-01), Ushikawa
patent: 5330352 (1994-07-01), Watanabe et al.
patent: 5567152 (1996-10-01), Morimoto

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