Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Reexamination Certificate
2011-04-12
2011-04-12
Wilson, Gregory A (Department: 3749)
Heating
Work feeding, agitating, discharging or conveying...
Removable furnace bottom section or kiln cart
C432S006000, C414S940000
Reexamination Certificate
active
07922485
ABSTRACT:
Disclosed is a vertical type heat processing apparatus and a vertical type heat processing method, which can prevent fall down of the boat on a boat carrier mechanism to be caused by an external force, such as an earthquake or the like, by employing a simple structure, while taking a form of the two-boat system. The vertical type heat processing apparatus1includes a heating furnace5having a furnace port5a, a cover17adapted to close the furnace port5a, a pair of substrate holding tools4each adapted to hold multiple substrates W in a multistage fashion and configured to be placed on the cover17via a heat insulating mount19, and a lifting mechanism18adapted to raise and lower the cover17so as to carry in and carry out each substrate holding tool4relative to the heating furnace5. When one substrate holding tool4is in the heating furnace5, the other substrate holding tool4is placed on a substrate-holding-tool table22for loading the substrates W thereon. Each substrate holding tool4is carried between the-substrate-holding-tool table22and the heat insulating mount19due to the substrate-holding-tool carrier mechanism23. To the substrate-holding-carrier mechanism23, a fall-down prevention member37adapted to control each substrate holding tool4is provided.
REFERENCES:
patent: 5048164 (1991-09-01), Harima
patent: 5055036 (1991-10-01), Asano et al.
patent: 5236181 (1993-08-01), Ishii et al.
patent: 5407181 (1995-04-01), Ohsawa
patent: 5725664 (1998-03-01), Nanbu et al.
patent: 5829969 (1998-11-01), Miyashita et al.
patent: 6206974 (2001-03-01), Iida et al.
patent: 6540469 (2003-04-01), Matsunaga et al.
patent: 6573198 (2003-06-01), Boonstra et al.
patent: 7357846 (2008-04-01), Fujishima
patent: 10-107019 (1998-04-01), None
patent: 2000-150403 (2000-05-01), None
patent: 3378241 (2002-12-01), None
patent: 2004-071618 (2004-03-01), None
patent: 2004-71618 (2004-03-01), None
patent: 3579278 (2004-07-01), None
Japanese Office Action issued on Jun. 9, 2009 for Japanese Patent Application No. 2007-195591 with English translation.
Chinese Office Action issued on Oct. 13, 2010 for Application No. 200810074119.8 w/ English language translation.
Hishiya Katsuyuki
Nitadori Hiromi
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
Wilson Gregory A
LandOfFree
Vertical type heat processing apparatus and vertical type... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Vertical type heat processing apparatus and vertical type..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vertical type heat processing apparatus and vertical type... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2708194