Vertical furnace for heat-treating semiconductor

Details Vertical furnace for heat-treating semiconductor Vertical furnace for heat-treating semiconductor

1984-12-26

1986-09-09

Yuen, Henry C.

Heating

Work feeding, agitating, discharging or conveying...

Removable furnace bottom section or kiln cart

432124, 432253, 432 6, F27D 500, F27B 900

Patent

active

046106286

ABSTRACT:
A vertical furnace for heat-treating a semiconductor is disclosed which is capable of effectively and safely accomplishing the heat-treating of a semiconductor. The vertical furnace includes a furnace section which is open at the lower end thereof to allow a boat for supporting a semiconductor thereon to be introduced and removed through the lower open end with respect to the furnace section. Also, a vertical furnace is disclosed which is adapted to effectively prevent a semiconductor from being polluted by dust in an operation space.

REFERENCES:
patent: 1838015 (1931-12-01), Von Forester et al.
patent: 2344035 (1944-03-01), Etten
patent: 2454253 (1948-11-01), Kniveton
patent: 2940745 (1960-06-01), Grieger et al.
patent: 3463470 (1969-08-01), Green et al.
patent: 3836325 (1974-09-01), Nakamura et al.
patent: 3867093 (1975-02-01), Huttermann
patent: 4439146 (1984-03-01), Sugita

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