Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Reexamination Certificate
2011-03-01
2011-03-01
Wilson, Gregory A (Department: 3749)
Heating
Work feeding, agitating, discharging or conveying...
Removable furnace bottom section or kiln cart
C414S940000
Reexamination Certificate
active
07896648
ABSTRACT:
The present invention is a vertical heat processing apparatus comprising: a heat processing furnace having a furnace opening; a lid member for closing the furnace opening of the heat processing furnace; a first substrate holder and a second substrate holder, each of which is capable of holding a plurality of substrates in a tier-like manner and of being alternately placed on the lid member through a heat retention tube; an elevating mechanism that vertically moves the lid member to load one of the substrate holders into the heat processing furnace, and to unload the one of the substrate holders from the heat processing furnace; a holder table configured to be placed thereon the other of the substrate holders for transfer of the substrates, when the one of the substrate holders is in the heat processing furnace; and a holder conveying mechanism configured to convey the respective substrate holders between the holder table and the heat retention tube; wherein the holder table is provided with a holder gripping mechanism for gripping the substrate holder to prevent turnover thereof.
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Notification of Reasons for Rejection issued on Jan. 6, 2009.
Chinese Office Action issued on May 10, 2010 for Application No. 200810009041.1 with English translation.
Hishiya Katsuyuki
Nitadori Hiromi
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
Wilson Gregory A
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