Vertical diffusion furnace having improved gas flow

Details Vertical diffusion furnace having improved gas flow Vertical diffusion furnace having improved gas flow

1995-11-16

1997-04-01

Kamen, Noah P.

Heating

Work feeding, agitating, discharging or conveying...

Removable furnace bottom section or kiln cart

432152, F27D 312

Patent

active

056160259

ABSTRACT:
A vertical diffusion furnace comprising; a quartz tube, a plurality of wafers loaded into the quartz tube, and a gas inlet formed in the quartz tube proximate a lowermost wafer in the plurality of wafers, and providing reactive gases into the quartz tube.

REFERENCES:
patent: 4790750 (1988-12-01), Bourel et al.
patent: 5330352 (1994-07-01), Watanabe et al.
patent: 5445521 (1995-08-01), Yamaguchi et al.

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