Vertical heat treating equipment

Details Vertical heat treating equipment Vertical heat treating equipment

2005-10-25

2005-10-25

Wilson, Gregory (Department: 3749)

Heating

Work feeding, agitating, discharging or conveying...

Removable furnace bottom section or kiln cart

C432S237000, C432S250000, C118S730000, C118S732000

Reexamination Certificate

active

06957956

ABSTRACT:
A vertical heat-processing apparatus (1) includes a vertical heat-processing furnace (2) having a furnace port (3), a lid (5) movable up and down to open and close the furnace port, and a rotation mechanism (15) disposed on the lid to rotate a holder (13) that holds a number of target substrates (W). The rotation mechanism (15) includes a rotary shaft (16), and a support unit (19) that supports the rotary shaft (16) rotatably through a bearing (17) and sealing member (18). The rotary shaft (16) has a hollow structure with a thin wall, and is supplied with a cooling gas to flow inside and outside the rotary shaft. The support unit (19) has a cooling passage (32) surrounding an upper portion of the rotary shaft (16), and is supplied with a coolant to flow through the cooling passage.

REFERENCES:
patent: 5324540 (1994-06-01), Terada
patent: 5421892 (1995-06-01), Miyagi
patent: 5908292 (1999-06-01), Smith et al.
patent: 6235121 (2001-05-01), Honma et al.
patent: 4-026115 (1992-01-01), None
patent: 6-168904 (1994-06-01), None
patent: 2001-297987 (2001-10-01), None

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